Modeling Piezoelectric Stack ALctuators for Control of Micromanipulation

nonlinear lumped-parameter model of a piezoelectric stack A, ctuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for microrobotic applications requiring accurate position andor force control. In formulating this model, the authors propose a generalized Maxwell resistive capacitor as a lumped-parameter causal representation of rate-independent hysteresis. Model formulation is validated by comparing results of numerical simulations to experimental data. Validation is followed by a discussion of model implications for purposes of actuator control.